| dc.contributor.advisor | Duane S. Boning. | en_US |
| dc.contributor.author | Nishimoto, Angie Shizue, 1977- | en_US |
| dc.date.accessioned | 2013-08-22T18:51:55Z | |
| dc.date.available | 2013-08-22T18:51:55Z | |
| dc.date.copyright | 1999 | en_US |
| dc.date.issued | 1999 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/80107 | |
| dc.description | Thesis (S.B. and M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999. | en_US |
| dc.description | Includes bibliographical references (leaf 40). | en_US |
| dc.description.statementofresponsibility | by Angie Shizue Nishimoto. | en_US |
| dc.format.extent | 40 leaves | en_US |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | en_US |
| dc.subject | Electrical Engineering and Computer Science | en_US |
| dc.title | Assessment of an infrared camera for use as a control sensor for the chemical mechanical planarization process | en_US |
| dc.title.alternative | Assessment of an infrared camera for use as a control sensor for the CMP | en_US |
| dc.title.alternative | Assessment of an infrared sensor for control of chemical mechanical planarization | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | S.B.and M.Eng. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | |
| dc.identifier.oclc | 43555718 | en_US |
