Characterization and modeling of uniformity in chemical mechanical polishing
Author(s)
Oji, Charles (Charles Ojih), 1974-![Thumbnail](/bitstream/handle/1721.1/80109/43556183-MIT.pdf.jpg?sequence=5&isAllowed=y)
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Alternative title
Characterization and modeling in chemical mechanical polishing processes
Advisor
Duane Boning and James Chung.
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Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999. Includes bibliographical references (leaves 55-56).
Date issued
1999Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science