Characterization and modeling of uniformity in chemical mechanical polishing

Author(s)
Oji, Charles (Charles Ojih), 1974-
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Alternative title
Characterization and modeling in chemical mechanical polishing processes
Advisor
Duane Boning and James Chung.
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Description
Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.
 
Includes bibliographical references (leaves 55-56).
 
Date issued
1999
URI
http://hdl.handle.net/1721.1/80109
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science
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