| dc.contributor.advisor | Duane Boning and James Chung. | en_US |
| dc.contributor.author | Oji, Charles (Charles Ojih), 1974- | en_US |
| dc.date.accessioned | 2013-08-22T18:52:03Z | |
| dc.date.available | 2013-08-22T18:52:03Z | |
| dc.date.copyright | 1999 | en_US |
| dc.date.issued | 1999 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/80109 | |
| dc.description | Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999. | en_US |
| dc.description | Includes bibliographical references (leaves 55-56). | en_US |
| dc.description.statementofresponsibility | by Charles Oji. | en_US |
| dc.format.extent | 91 leaves | en_US |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | en_US |
| dc.subject | Electrical Engineering and Computer Science | en_US |
| dc.title | Characterization and modeling of uniformity in chemical mechanical polishing | en_US |
| dc.title.alternative | Characterization and modeling in chemical mechanical polishing processes | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | M.Eng. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | |
| dc.identifier.oclc | 43556183 | en_US |
