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A machine for tribological experimentation on indexing continuous media with specific application to semiconductor testing

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A machine for tribological experimentation on indexing continuous media with specific application to semiconductor testing

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Author: Sprunt, Alexander D. (Alexander Dalziel), 1977-
Other Contributors: Massachusetts Institute of Technology. Dept. of Mechanical Engineering.
Advisor: Alexander H. Slocum.
Department: Massachusetts Institute of Technology. Dept. of Mechanical Engineering.
Publisher: Massachusetts Institute of Technology
Date Issued: 2001
Description:
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2001.Includes bibliographical references (p. 103).
URI: http://hdl.handle.net/1721.1/8555
Keywords: Mechanical Engineering.

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