Fabrication of ultra-thin strained silicon on insulator

Author(s)
Drake, Tonya S. (Tonya Sue), 1978-
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Alternative title
Fabrication of ultra-thin SSOI
Other Contributors
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science.
Advisor
Judy L. Hoyt.
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Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2003.
 
Includes bibliographical references (p. 126-130).
 
Date issued
2003
URI
http://hdl.handle.net/1721.1/87350
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.
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