| dc.contributor.advisor | Judy L. Hoyt. | en_US |
| dc.contributor.author | Drake, Tonya S. (Tonya Sue), 1978- | en_US |
| dc.contributor.other | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science. | en_US |
| dc.date.accessioned | 2014-05-23T19:21:48Z | |
| dc.date.available | 2014-05-23T19:21:48Z | |
| dc.date.copyright | 2003 | en_US |
| dc.date.issued | 2003 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/87350 | |
| dc.description | Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2003. | en_US |
| dc.description | Includes bibliographical references (p. 126-130). | en_US |
| dc.description.statementofresponsibility | by Tonya S. Drake. | en_US |
| dc.format.extent | 130 p. | en_US |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | en_US |
| dc.subject | Electrical Engineering and Computer Science. | en_US |
| dc.title | Fabrication of ultra-thin strained silicon on insulator | en_US |
| dc.title.alternative | Fabrication of ultra-thin SSOI | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | S.M. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | |
| dc.identifier.oclc | 53225571 | en_US |
