Precision passive alignment of wafers

Author(s)
Weber, Alexis Christian, 1974-
Thumbnail
DownloadFull printable version (10.22Mb)
Other Contributors
Massachusetts Institute of Technology. Department of Mechanical Engineering.
Advisor
Alexander H. Slocum.
Terms of use
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582
Metadata
Show full item record
Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2002.
 
Includes bibliographical references (p. 73-75).
 
Date issued
2002
URI
http://hdl.handle.net/1721.1/89364
Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering.
Collections