| dc.contributor.advisor | Alexander H. Slocum. | en_US |
| dc.contributor.author | Weber, Alexis Christian, 1974- | en_US |
| dc.contributor.other | Massachusetts Institute of Technology. Department of Mechanical Engineering. | en_US |
| dc.date.accessioned | 2014-09-09T17:56:51Z | |
| dc.date.available | 2014-09-09T17:56:51Z | |
| dc.date.copyright | 2002 | en_US |
| dc.date.issued | 2002 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/89364 | |
| dc.description | Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2002. | en_US |
| dc.description | Includes bibliographical references (p. 73-75). | en_US |
| dc.description.statementofresponsibility | by Alexis Christian Weber. | en_US |
| dc.format.extent | 102 p. | en_US |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | en_US |
| dc.subject | Mechanical Engineering. | en_US |
| dc.title | Precision passive alignment of wafers | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | S.M. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Mechanical Engineering | |
| dc.identifier.oclc | 51830267 | en_US |
