| dc.contributor.advisor | Martin L. Culpepper. | en_US |
| dc.contributor.author | Chen, Shih-Chi, 1977- | en_US |
| dc.contributor.other | Massachusetts Institute of Technology. Department of Mechanical Engineering. | en_US |
| dc.date.accessioned | 2014-09-09T17:58:56Z | |
| dc.date.available | 2014-09-09T17:58:56Z | |
| dc.date.copyright | 2003 | en_US |
| dc.date.issued | 2003 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/89396 | |
| dc.description | Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003. | en_US |
| dc.description | Includes bibliographical references (leaves 111-113). | en_US |
| dc.description.statementofresponsibility | by Shih-Chi Chen. | en_US |
| dc.format.extent | 117 leaves | en_US |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | en_US |
| dc.subject | Mechanical Engineering. | en_US |
| dc.title | A six-degree-of-freedom compliant micro-manipulator for silicon optical bench | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | S.M. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Mechanical Engineering | |
| dc.identifier.oclc | 54540049 | en_US |
