Chemical vapor deposition modeling using direct simulation Monte Carlo with non-linear chemistry and level set profile evolution

Author(s)
Al-Mohssen, Husain Ali, 1977-
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Massachusetts Institute of Technology. Department of Mechanical Engineering.
Advisor
Nicolas G. Hadjiconstantinou.
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Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.
 
Includes bibliographical references.
 
Date issued
2003
URI
http://hdl.handle.net/1721.1/89933
Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering.
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