| dc.contributor.advisor | Nicolas G. Hadjiconstantinou. | en_US |
| dc.contributor.author | Al-Mohssen, Husain Ali, 1977- | en_US |
| dc.contributor.other | Massachusetts Institute of Technology. Department of Mechanical Engineering. | en_US |
| dc.date.accessioned | 2014-09-19T21:29:29Z | |
| dc.date.available | 2014-09-19T21:29:29Z | |
| dc.date.copyright | 2003 | en_US |
| dc.date.issued | 2003 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/89933 | |
| dc.description | Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003. | en_US |
| dc.description | Includes bibliographical references. | en_US |
| dc.description.statementofresponsibility | by Husain Ali Al-Mohssen. | en_US |
| dc.format.extent | 69 p. | en_US |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | en_US |
| dc.subject | Mechanical Engineering. | en_US |
| dc.title | Chemical vapor deposition modeling using direct simulation Monte Carlo with non-linear chemistry and level set profile evolution | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | S.M. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Mechanical Engineering | |
| dc.identifier.oclc | 54663274 | en_US |
