Magnetic bearing stages for electron beam lithography

Author(s)
Konkola, Paul Thomas, 1973-
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Massachusetts Institute of Technology. Dept. of Mechanical Engineering.
Advisor
David L. Trumper.
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Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.
 
Includes bibliographical references (p. 217-220).
 
Date issued
1998
URI
http://hdl.handle.net/1721.1/9315
Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering.
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