Ice and abrasive particles : an alternative CMP polishing technique

Author(s)
Born, Melanie P. (Melanie Providencia), 1975-
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Advisor
Nam P. Suh.
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Description
Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.
 
Includes bibliographical references (p. 45-46).
 
Date issued
1998
URI
http://hdl.handle.net/1721.1/9570
Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering
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