Ice and abrasive particles : an alternative CMP polishing technique
Author(s)
Born, Melanie P. (Melanie Providencia), 1975-![Thumbnail](/bitstream/handle/1721.1/9570/42004628-MIT.pdf.jpg?sequence=5&isAllowed=y)
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Advisor
Nam P. Suh.
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Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998. Includes bibliographical references (p. 45-46).
Date issued
1998Department
Massachusetts Institute of Technology. Department of Mechanical EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering