Ice and abrasive particles : an alternative CMP polishing technique
Author(s)Born, Melanie P. (Melanie Providencia), 1975-
Nam P. Suh.
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Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.Includes bibliographical references (p. 45-46).
DepartmentMassachusetts Institute of Technology. Dept. of Mechanical Engineering
Massachusetts Institute of Technology