Development of calibration standards for accurate measurement of geometry in microelectromechanical systems
Author(s)
Deutsch, Erik R. (Erik Robertson), 1974-
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Advisor
Stephen D. Senturia.
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Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. Includes bibliographical references (leaves 45-46).
Date issued
1998Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science