Improving productivity of semiconductor manufacturing cluster tools

Author(s)
Nickel, Randal T
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Advisor
Charles H. Fine, Lionel C. Kimerling.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Sloan School of Management, 1994, and Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering, 1994.
Date issued
1994
URI
http://hdl.handle.net/1721.1/12091
Department
Massachusetts Institute of Technology. Department of Electrical Engineering; Sloan School of Management; Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Sloan School of Management, Electrical Engineering
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