| dc.contributor.advisor | Charles H. Fine, Lionel C. Kimerling. | en_US |
| dc.contributor.author | Nickel, Randal T | en_US |
| dc.date.accessioned | 2005-08-16T22:28:21Z | |
| dc.date.available | 2005-08-16T22:28:21Z | |
| dc.date.copyright | 1994 | en_US |
| dc.date.issued | 1994 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/12091 | |
| dc.description | Thesis (M.S.)--Massachusetts Institute of Technology, Sloan School of Management, 1994, and Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering, 1994. | en_US |
| dc.description.statementofresponsibility | by Randall T. Nickel. | en_US |
| dc.format.extent | 85 leaves | en_US |
| dc.format.extent | 9611491 bytes | |
| dc.format.extent | 9611247 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Sloan School of Management | en_US |
| dc.subject | Electrical Engineering | en_US |
| dc.title | Improving productivity of semiconductor manufacturing cluster tools | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | M.S. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering | en_US |
| dc.contributor.department | Sloan School of Management | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | |
| dc.identifier.oclc | 31673904 | en_US |
