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Silicon micromachined wafer-bonded valves

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dc.contributor.advisor Martin A. Schmidt. en_US
dc.contributor.author Huff, Michael Allan en_US
dc.date.accessioned 2007-08-29T18:52:26Z
dc.date.available 2007-08-29T18:52:26Z
dc.date.copyright 1993 en_US
dc.date.issued 1993 en_US
dc.identifier.uri http://dspace.mit.edu/handle/1721.1/12727 en_US
dc.identifier.uri http://hdl.handle.net/1721.1/12727
dc.description Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1993. en_US
dc.description Includes bibliographical references (v. 2, leaves 429-436). en_US
dc.description.statementofresponsibility by Michael Allan Huff. en_US
dc.format.extent 2 v. (436 leaves) en_US
dc.language.iso eng en_US
dc.publisher Massachusetts Institute of Technology en_US
dc.rights M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. en_US
dc.rights.uri http://dspace.mit.edu/handle/1721.1/12727 en_US
dc.rights.uri http://dspace.mit.edu/handle/1721.1/7582
dc.subject Electrical Engineering and Computer Science en_US
dc.title Silicon micromachined wafer-bonded valves en_US
dc.type Thesis en_US
dc.description.degree Ph.D. en_US
dc.contributor.department Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science en_US
dc.identifier.oclc 28896157 en_US


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