On the growth of semiconductor-based epitaxial and oxide films from low energy ion beams
Author(s)
Vancauwenberghe, Olivier P. J.
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Thesis: Ph. D., Massachusetts Institute of Technology, Department of Materials Science and Engineering, 1992 Vita. Includes bibliographical references (leaves 205-212).
Date issued
1992Department
Massachusetts Institute of Technology. Department of Materials Science and EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering