6.152J / 3.155J Microelectronics Processing Technology, Fall 2003
Citable URI:
http://hdl.handle.net/1721.1/36872
| Title: | 6.152J / 3.155J Microelectronics Processing Technology, Fall 2003 |
| Author: | Schmidt, Martin A.; O'Handley, Robert C., 1942-; Ruff, Susan |
| Issue Date: | 2003-12 |
| Abstract: | Introduces the theory and technology of integrated-circuit fabrication. Lectures and laboratory sessions on basic processing techniques such as diffusion, oxidation, epitaxy, photolithography, chemical vapor deposition, and plasma etching. Emphasis on the interrelationships between material properties, device structure, and the electrical behavior of devices. Provides background for thesis work in microelectronics or for 6.151. From the course home page: Course Description This course introduces the theory and technology of micro/nano fabrication. Lectures and laboratory sessions focus on basic processing techniques such as diffusion, oxidation, photolithography, chemical vapor deposition, and more. Through team lab assignments, students are expected to gain an understanding of these processing techniques, and how they are applied in concert to device fabrication. Students enrolled in this course have a unique opportunity to fashion and test micro/nano-devices, using modern techniques and technology. |
| URI: | http://hdl.handle.net/1721.1/36872 |
| Other Identifiers: | 6.152J-Fall2003 |
| Other Identifiers: | 6.152J 3.155J IMSCP-MD5-beaf56117a9c987185ba38d080bf124a |
| Keywords: | microelectronics, Microelectronics processing, integrated circuits, vacuum, chemical vapor deposition, CVD, oxidation, diffusion, implantation, lithography, soft lithography, etching, sputtering, evaporation, interconnect, metallization, crystal growth, reliability, fabrication, processing, photolithography, physical vapor deposition, MOS, MOS capacitor, microcantilever, microfluidic, 6.152J, 3.155J, 6.152, 3.155, 140902, Computer Hardware Engineering |
Files in this item
| Files | Size | Format |
|---|---|---|
| 6-152JFall2003/ ... l2003/CourseHome/index.htm | 15.37Kb | text/html |
The following license files are associated with this item:
This item appears in the following Collection(s)
-
Electrical Engineering and Computer Science (6) -
Electrical Engineering and Computer Science (6) -
Materials Science and Engineering (3) - Archived
Materials Science and Engineering (3)
All Items in DSpace@MIT are protected by original copyright, with all rights reserved, unless otherwise indicated.
|
|
Contact
MIT Libraries
|