Qualification of a medium current ion implantation system in a semiconductor production environment

Author(s)
Joung, Sandra K. (Sandra Kyongmee)
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Advisor
Lionel C. Kimerling.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996.
 
Includes bibliographical references (p. 50-51).
 
Date issued
1996
URI
http://hdl.handle.net/1721.1/40220
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering
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