| dc.contributor.advisor |
David K. Roylance. |
en_US |
| dc.contributor.author |
Ng, Grace Siu-Yee, 1980- |
en_US |
| dc.contributor.other |
Massachusetts Institute of Technology. Dept. of Materials Science and Engineering. |
en_US |
| dc.date.accessioned |
2009-07-01T18:47:11Z |
|
| dc.date.available |
2009-07-01T18:47:11Z |
|
| dc.date.copyright |
2003 |
en_US |
| dc.date.issued |
2003 |
en_US |
| dc.identifier.uri |
http://dspace.mit.edu/handle/1721.1/43618 |
en_US |
| dc.identifier.uri |
http://hdl.handle.net/1721.1/43618 |
|
| dc.description |
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2003. |
en_US |
| dc.description |
Includes bibliographical references (leaves 58-59). |
en_US |
| dc.description.provenance |
Made available in DSpace on 2009-07-01T18:47:11Z (GMT). No. of bitstreams: 2
54818365.pdf: 16855378 bytes, checksum: 86208ea4addce98adef42331750c53d0 (MD5)
54818365-MIT.pdf: 16855184 bytes, checksum: 36ed22802b83c4fe576ef6ee2a478a0e (MD5)
Previous issue date: 2003 |
en |
| dc.description.statementofresponsibility |
by Grace Siu-Yee Ng. |
en_US |
| dc.format.extent |
59 leaves |
en_US |
| dc.language.iso |
eng |
en_US |
| dc.publisher |
Massachusetts Institute of Technology |
en_US |
| dc.rights |
M.I.T. theses are protected by
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission. |
en_US |
| dc.rights.uri |
http://dspace.mit.edu/handle/1721.1/43618 |
en_US |
| dc.rights.uri |
http://dspace.mit.edu/handle/1721.1/7582 |
en_US |
| dc.subject |
Materials Science and Engineering. |
en_US |
| dc.title |
Effect of chemical mechanical planarization processing conditions on polyurethane pad properties |
en_US |
| dc.type |
Thesis |
en_US |
| dc.description.degree |
S.M. |
en_US |
| dc.contributor.department |
Massachusetts Institute of Technology. Dept. of Materials Science and Engineering. |
en_US |
| dc.identifier.oclc |
54818365 |
en_US |
