Effect of chemical mechanical planarization processing conditions on polyurethane pad properties
Citable URI:
http://hdl.handle.net/1721.1/43618
| Title: | Effect of chemical mechanical planarization processing conditions on polyurethane pad properties |
| Author: | Ng, Grace Siu-Yee, 1980- |
| Other Contributors: | Massachusetts Institute of Technology. Dept. of Materials Science and Engineering. |
| Advisor: | David K. Roylance. |
| Department: | Massachusetts Institute of Technology. Dept. of Materials Science and Engineering. |
| Publisher: | Massachusetts Institute of Technology |
| Issue Date: | 2003 |
| Description: |
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2003. Includes bibliographical references (leaves 58-59). |
| URI: |
http://dspace.mit.edu/handle/1721.1/43618
http://hdl.handle.net/1721.1/43618 |
| Keywords: | Materials Science and Engineering. |
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| Preview, non-printable (open to all) | 16.85Mb | application/pdf |
| Full printable version (MIT only) | 16.85Mb | application/pdf |
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