Computer-Integrated Design and Manufacture of Integrated Circuits
Citable URI:
http://hdl.handle.net/1721.1/57331
| Title: | Computer-Integrated Design and Manufacture of Integrated Circuits |
| Author: | Troxel, Donald E.; Fischer, Gregory T.; Lohman, Thomas J.; Bonvik, Asbjoern M.; Nemec, Joseph E.; Moyne, William P.; Kwon, Jimmy Y.; Carney, John C.; Kao, James T.; McIlrath, Michael B.; Antoniadis, Dimitri A.; Boning, Duane S.; Rahman, Nadir E.; Jacobs, Jarvis B.; Jackson, Keith M.; Wright, Chantal E.; Chery, Yonald; Wessling, Owen |
| Publisher: | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| Issue Date: | 1995-01-01 |
| Description: | Contains research goals and objectives, reports on sixteen research projects and a list of publications. |
| URI: | http://hdl.handle.net/1721.1/57331 |
| Other Identifiers: | RLE_PR_138_03_01s_02 |
| Is Part Of | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1995 Systems And Signals Computer-Aided Design Computer-Integrated Design and Manufacture of Integrated Circuits |
| Series/Report no.: | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 138 |
| Keywords: | Computer-Integrated Design of Integrated Circuits, Computer-Integrated Manufacture of Integrated Circuits, Operating High Variability Manufacturing Systems, Distributed Discrete Event Simulation, QUAN: A Language for the Schedule Of Repetitive Manufacturing Systems, Microsystems Factory Representation, Run-by-Run: Interfaces, Run-by-Run: Implementation, Run-by-Run: Integration, Remote Fabrication of Integrated Circuits, Message Passing Tools for Software Integration, Remote Microscope for Inspection of Integrated Circuits, Semiconductor Manufacturing Process Flow Representation, Computer-Aided Technology Design, Modeling of Advanced Device Structures, Semiconductor Process Repository, Process Capabilities Database, National Infrastructure for Networked Design, National Infrastructure for Networked Prototyping, Metal Reliability, Metal Electromigration, RTFM: A Digital Design Lab Expert |
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|---|---|---|---|---|
| RLE_PR_138_03_01s_02.pdf | 1.795Mb |
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