| dc.contributor.advisor |
Eugene A. Fitzgerald. |
en_US |
| dc.contributor.author |
Berlin, Dean Edward, 1978- |
en_US |
| dc.contributor.other |
Massachusetts Institute of Technology. Dept. of Materials Science and Engineering. |
en_US |
| dc.date.accessioned |
2005-08-23T20:05:58Z |
|
| dc.date.available |
2005-08-23T20:05:58Z |
|
| dc.date.copyright |
2002 |
en_US |
| dc.date.issued |
2002 |
en_US |
| dc.identifier.uri |
http://hdl.handle.net/1721.1/8427 |
|
| dc.description |
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2002. |
en_US |
| dc.description |
Includes bibliographical references (p. 110-112). |
en_US |
| dc.description.statementofresponsibility |
by Dean Edward Berlin. |
en_US |
| dc.format.extent |
119 p. |
en_US |
| dc.format.extent |
9002922 bytes |
|
| dc.format.extent |
9002681 bytes |
|
| dc.format.mimetype |
application/pdf |
|
| dc.format.mimetype |
application/pdf |
|
| dc.language.iso |
eng |
en_US |
| dc.publisher |
Massachusetts Institute of Technology |
en_US |
| dc.rights |
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. |
en_US |
| dc.rights.uri |
http://dspace.mit.edu/handle/1721.1/7582 |
|
| dc.subject |
Materials Science and Engineering. |
en_US |
| dc.title |
Fabricating silicon germanium waveguides by low pressure chemical vapor deposition |
en_US |
| dc.type |
Thesis |
en_US |
| dc.description.degree |
S.M. |
en_US |
| dc.contributor.department |
Massachusetts Institute of Technology. Dept. of Materials Science and Engineering. |
en_US |
| dc.identifier.oclc |
50633021 |
en_US |
