Problem Set 1: Vacuum System, CVD (PDF) |
(PDF) |
Problem Set 2: CVD, Oxidation (PDF) |
(PDF) |
Problem Set 3: Diffusion, Implantation (PDF) |
(PDF) |
Problem Set 4: Lithography (PDF) |
(PDF) |
Problem Set 5: Etching (PDF) |
(PDF) |
Problem Set 6: Sputtering, Evaporation, Interconnect (PDF) |
(PDF) |
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