| 1 |
Overview/Safety/Lab Assignment (MAS) (PDF) |
| 2 |
IC Lab: Overview (MAS) (PDF)
Introduction to Communication Intensive subject in the Major (undergraduate institute requirement) (SR) |
| 3 |
Vacuum System (RCOH) (PDF) |
| 4 |
CVD (RCOH) (PDF) |
| 5 |
Oxidation (RCOH) (PDF) |
| 6 |
IC Lab: Testing (MAS) (PDF)
Writing Technical Reports (SR) (PDF) Courtesy of Thea Singer. |
| 7 |
Diffusion (RCOH) (PDF) |
| 8 |
Diffusion/Implantation (RCOH) (PDF) |
| 9 |
MEMS Lab: Overview (MAS) |
| 10 |
Lithography (MAS) (PDF - 1.6 MB) |
| 11 |
Lithography, Soft Lithography (MAS) |
| 12 |
MEMS Lab: Testing (MAS) (PDF) |
| 13 |
Quiz#1 (includes topics through Lithography) (Staff) |
| 14 |
Etching (wet) (MAS)
Guidance for MEMS Report (SR) |
| 15 |
Etching (dry) (MAS) |
| 16 |
Fluids Lab: Overview (MAS) (PDF - 1.1 MB) Courtesy of Dr. Hang Lu. |
| 17 |
Sputtering (RCOH) (PDF) |
| 18 |
Evaporation (RCOH) (PDF - 1.4 MB)
Feedback on MEMS Report (SR) |
| 19 |
Interconnect (RCOH) (PDF) |
| 20 |
Advanced Si Devices (MAS) |
| 21 |
Crystal Growth (RCOH) (PDF) |
| 22 |
Reliability (RCOH) (PDF) |
| 23 |
Fluids Lab: Testing (MAS) (PDF - 1.0 MB) |
| 24 |
Quiz#2 (includes topics from Soft Lithography through Reliability) (Staff) |
| 25 |
Special Topic: Nanobiology (PDF- 2.5 MB) |
| 26 |
Special Topic: Nanobiology (Guest) Nanolithography (RCOH) |