Study of gold diffusion kinetics in p/p+ epitaxial silicon
Author(s)
Wu, Edward C. (Edward Chang-Hung), 1976-
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Advisor
Lionel C. Kimerling.
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Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1998. Includes bibliographical references (leaf 34).
Date issued
1998Department
Massachusetts Institute of Technology. Department of Materials Science and EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering