SIMOX BOX metrology : using physical and electrical characterization

Author(s)
Yoon, Jung Uk, 1971-
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Advisor
James E. Chung, Carl V. Thompson II.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.
 
Vita.
 
Includes bibliographical references (p. 47-49).
 
Date issued
1995
URI
http://hdl.handle.net/1721.1/32682
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering
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