SIMOX BOX metrology : using physical and electrical characterization
Author(s)
Yoon, Jung Uk, 1971-![Thumbnail](/bitstream/handle/1721.1/32682/34312002-MIT.pdf.jpg?sequence=5&isAllowed=y)
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Advisor
James E. Chung, Carl V. Thompson II.
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Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995. Vita. Includes bibliographical references (p. 47-49).
Date issued
1995Department
Massachusetts Institute of Technology. Department of Materials Science and EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering