| dc.contributor.advisor | James E. Chung, Carl V. Thompson II. | en_US |
| dc.contributor.author | Yoon, Jung Uk, 1971- | en_US |
| dc.date.accessioned | 2006-05-15T20:21:35Z | |
| dc.date.available | 2006-05-15T20:21:35Z | |
| dc.date.copyright | 1995 | en_US |
| dc.date.issued | 1995 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/32682 | |
| dc.description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995. | en_US |
| dc.description | Vita. | en_US |
| dc.description | Includes bibliographical references (p. 47-49). | en_US |
| dc.description.statementofresponsibility | by Jung Uk Yoon. | en_US |
| dc.format.extent | 50 p. | en_US |
| dc.format.extent | 2755706 bytes | |
| dc.format.extent | 2756265 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Materials Science and Engineering | en_US |
| dc.title | SIMOX BOX metrology : using physical and electrical characterization | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | M.S. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Materials Science and Engineering | |
| dc.identifier.oclc | 34312002 | en_US |
