A new coating method for semiconductor lithography : fluid layer overlap in extrusion-spin coating
Author(s)
Derksen, James Stephen
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Alternative title
Fluid layer overlap in extrusion-spin coating
Advisor
Jung-Hoon Chun.
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Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997. Includes bibliographical references (p. 128-131).
Date issued
1997Department
Massachusetts Institute of Technology. Department of Mechanical EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering