| dc.contributor.advisor | Jung-Hoon Chun. | en_US |
| dc.contributor.author | Derksen, James Stephen | en_US |
| dc.date.accessioned | 2008-11-07T20:13:39Z | |
| dc.date.available | 2008-11-07T20:13:39Z | |
| dc.date.copyright | 1997 | en_US |
| dc.date.issued | 1997 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/43575 | |
| dc.description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997. | en_US |
| dc.description | Includes bibliographical references (p. 128-131). | en_US |
| dc.description.statementofresponsibility | by James Stephen Derksen. | en_US |
| dc.format.extent | 131 p. | en_US |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | en_US |
| dc.subject | Mechanical Engineering | en_US |
| dc.title | A new coating method for semiconductor lithography : fluid layer overlap in extrusion-spin coating | en_US |
| dc.title.alternative | Fluid layer overlap in extrusion-spin coating | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | M.S. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Mechanical Engineering | |
| dc.identifier.oclc | 39919203 | en_US |
