dc.contributor.author | Velasquez-Garcia, Luis Fernando | |
dc.contributor.author | Gassend, Blaise | |
dc.contributor.author | Akinwande, Akintunde Ibitayo | |
dc.date.accessioned | 2012-08-08T19:24:18Z | |
dc.date.available | 2012-08-08T19:24:18Z | |
dc.date.issued | 2009-06 | |
dc.identifier.isbn | 978-1-4244-4193-8 | |
dc.identifier.isbn | 978-1-4244-4190-7 | |
dc.identifier.other | INSPEC Accession Number: 10917099 | |
dc.identifier.other | W2B.002 | |
dc.identifier.uri | http://hdl.handle.net/1721.1/72044 | |
dc.description.abstract | We report the fabrication and experimental characterization of a novel low-cost carbon nanotube (CNT)-based electron impact ionizer (EII) with integrated gate for portable mass spectrometry applications. The device achieves low-voltage ionization using sparse forests of plasma-enhanced chemical vapor deposited (PECVD) CNTs field emitter tips, and a proximal gate with open apertures to facilitate electron transmission. The gate is integrated using a deep reactive ion etched (DRIE) spring-based high-voltage MEMS packaging technology. The device also includes a high aspect-ratio silicon structure (mufoam) that facilitates sparse CNT growth and limits the electron current per emitter. The devices were tested as field emitters in high vacuum (10-8 Torr). Electron emission starts at a gate voltage of 110 V, and reaches a current of 9 uA at 250 V (2.25 mW) with more than 55% of the electrons transmitted through the gate apertures. The devices were also tested as electron impact ionizers using argon. The experimental data demonstrates that the CNT-EIIs can operate at mtorr-level pressures while delivering 60 nA of ion current at 250 V with about 1% ionization efficiency. | en_US |
dc.language.iso | en_US | |
dc.publisher | Institute of Electrical and Electronics Engineers | en_US |
dc.relation.isversionof | http://dx.doi.org/10.1109/SENSOR.2009.5285776 | en_US |
dc.rights | Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. | en_US |
dc.source | IEEE | en_US |
dc.title | CNT-based gas ionizers with integrated MEMS gate for portable mass spectrometry applications | en_US |
dc.type | Article | en_US |
dc.identifier.citation | Velasquez-Garcia, L.F., B. Gassend, and A.I. Akinwande. “CNT-based Gas Ionizers with Integrated MEMS Gate for Portable Mass Spectrometry Applications.” IEEE, 2009. 1646–1649. © 2009 IEEE. | en_US |
dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | en_US |
dc.contributor.department | Massachusetts Institute of Technology. Microsystems Technology Laboratories | en_US |
dc.contributor.approver | Akinwande, Akintunde Ibitayo | |
dc.contributor.mitauthor | Akinwande, Akintunde Ibitayo | |
dc.contributor.mitauthor | Velasquez-Garcia, Luis Fernando | |
dc.relation.journal | Proceedings of the 15th International Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009 | en_US |
dc.eprint.version | Final published version | en_US |
dc.type.uri | http://purl.org/eprint/type/ConferencePaper | en_US |
dspace.orderedauthors | Velasquez-Garcia, L.F.; Gassend, B.; Akinwande, A.I. | en |
dc.identifier.orcid | https://orcid.org/0000-0003-3001-9223 | |
mit.license | PUBLISHER_POLICY | en_US |
mit.metadata.status | Complete | |