Membrane-integrated superconducting nanowire single-photon detectors
Author(s)
Najafi, Faraz; Mower, Jacob; Hu, Xiaolong; Bellei, Francesco; Kharel, Prashanta; Dane, Andrew Edward; Ivry, Yachin; Cheong, Lin Lee; Sunter, Kristen; Englund, Dirk Robert; Berggren, Karl K.; ... Show more Show less
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We integrated superconducting nanowire single-photon detectors on sub-400-nm-thick silicon nitride membranes, which can then be transferred and aligned to photonic structures on a secondary chip with sub-micron placement accuracy.
Description
CLEO: QELS--Fundamental Science, San Jose, California United States, June 9-14, 2013
Date issued
2013-06Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer ScienceJournal
CLEO: QELS - Fundamental Science
Publisher
Optical Society of America
Citation
Najafi, F., J. Mower, X. Hu, F. Bellei, P. Kharel, A. Dane, Y. Ivry, L. Cheong, K. Sunter, D. Englund and K. K. Berggren. "Membrane-integrated superconducting nanowire single-photon detectors." CLEO: QELS - Fundamental Science, San Jose, California United States, June 9-14, 2013.
Version: Author's final manuscript
Other identifiers
QF1A.6.pdf
ISBN
9781557529732
978-1-55752-972-5