dc.contributor.author | Zou, J. | |
dc.contributor.author | Marcet, Z. | |
dc.contributor.author | Kravchenko, I. I. | |
dc.contributor.author | Lu, T. | |
dc.contributor.author | Bao, Y. | |
dc.contributor.author | Chan, H. B. | |
dc.contributor.author | Rodriguez, Alejandro | |
dc.contributor.author | Reid, McMahon Thomas Homer | |
dc.contributor.author | McCauley, Alexander Patrick | |
dc.contributor.author | Johnson, Steven G | |
dc.date.accessioned | 2016-11-18T18:08:47Z | |
dc.date.available | 2016-11-18T18:08:47Z | |
dc.date.issued | 2013-05 | |
dc.date.submitted | 2012-11 | |
dc.identifier.issn | 2041-1723 | |
dc.identifier.uri | http://hdl.handle.net/1721.1/105362 | |
dc.description.abstract | Quantum fluctuations give rise to van der Waals and Casimir forces that dominate the interaction between electrically neutral objects at sub-micron separations. Under the trend of miniaturization, such quantum electrodynamical effects are expected to play an important role in micro- and nano-mechanical devices. Nevertheless, utilization of Casimir forces on the chip level remains a major challenge because all experiments so far require an external object to be manually positioned close to the mechanical element. Here by integrating a force-sensing micromechanical beam and an electrostatic actuator on a single chip, we demonstrate the Casimir effect between two micromachined silicon components on the same substrate. A high degree of parallelism between the two near-planar interacting surfaces can be achieved because they are defined in a single lithographic step. Apart from providing a compact platform for Casimir force measurements, this scheme also opens the possibility of tailoring the Casimir force using lithographically defined components of non-conventional shapes. | en_US |
dc.description.sponsorship | United States. Defense Advanced Research Projects Agency (contract N66001-09-1-2070- DOD) | en_US |
dc.description.sponsorship | Singapore-MIT Alliance. Program in Computational Engineering | en_US |
dc.language.iso | en_US | |
dc.publisher | Nature Publishing Group | en_US |
dc.relation.isversionof | http://dx.doi.org/10.1038/ncomms2842 | en_US |
dc.rights | Creative Commons Attribution-Noncommercial-Share Alike | en_US |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-sa/4.0/ | en_US |
dc.source | arXiv | en_US |
dc.title | Casimir forces on a silicon micromechanical chip | en_US |
dc.type | Article | en_US |
dc.identifier.citation | Zou, J. et al. “Casimir Forces on a Silicon Micromechanical Chip.” Nature Communications 4 (2013): 1845. | en_US |
dc.contributor.department | Massachusetts Institute of Technology. Department of Mathematics | en_US |
dc.contributor.department | Massachusetts Institute of Technology. Department of Physics | en_US |
dc.contributor.department | Massachusetts Institute of Technology. Research Laboratory of Electronics | en_US |
dc.contributor.mitauthor | Rodriguez, Alejandro | |
dc.contributor.mitauthor | Reid, McMahon Thomas Homer | |
dc.contributor.mitauthor | McCauley, Alexander Patrick | |
dc.contributor.mitauthor | Johnson, Steven G | |
dc.relation.journal | Nature Communications | en_US |
dc.eprint.version | Author's final manuscript | en_US |
dc.type.uri | http://purl.org/eprint/type/JournalArticle | en_US |
eprint.status | http://purl.org/eprint/status/PeerReviewed | en_US |
dspace.orderedauthors | Zou, J.; Marcet, Z.; Rodriguez, A. W.; Reid, M. T. H.; McCauley, A. P.; Kravchenko, I. I.; Lu, T.; Bao, Y.; Johnson, S. G.; Chan, H. B. | en_US |
dspace.embargo.terms | N | en_US |
dc.identifier.orcid | https://orcid.org/0000-0001-7327-4967 | |
mit.license | OPEN_ACCESS_POLICY | en_US |
mit.metadata.status | Complete | |