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dc.contributor.authorWoller, Kevin Benjamin
dc.contributor.authorWhyte, Dennis G
dc.contributor.authorWright, Graham
dc.date.accessioned2018-07-25T18:47:58Z
dc.date.available2018-07-25T18:47:58Z
dc.date.issued2017-05
dc.date.submitted2017-02
dc.identifier.issn1070-664X
dc.identifier.issn1089-7674
dc.identifier.urihttp://hdl.handle.net/1721.1/117126
dc.description.abstractHelium ion energy distributions were measured in helicon wave-coupled plasmas of the dynamics of ion implantation and sputtering of surface experiment using a retarding field energy analyzer. The shape of the energy distribution is a double-peak, characteristic of radiofrequency plasma potential modulation. The broad distribution is located within a radius of 0.8 cm, while the quartz tube of the plasma source has an inner radius of 2.2 cm. The ion energy distribution rapidly changes from a double-peak to a single peak in the radius range of 0.7-0.9 cm. The average ion energy is approximately uniform across the plasma column including the double-peak and single peak regions. The widths of the broad distribution, ΔE, in the wave-coupled mode are large compared to the time-averaged ion energy, 〈E〉. On the axis (r = 0), ΔE/ 〈E〉 ≲ 3.4, and at a radius near the edge of the plasma column (r = 2.2 cm), ΔE/ 〈E〉 ∼ 1.2. The discharge parameter space is scanned to investigate the effects of the magnetic field, input power, and chamber fill pressure on the wave-coupled mode that exhibits the sharp radial variation in the ion energy distribution.en_US
dc.description.sponsorshipUnited States. Department of Energy (Award DESC00-02060)en_US
dc.description.sponsorshipUnited States. Department of Energy (Award DE-FC02-99ER54512)en_US
dc.publisherAmerican Institute of Physics (AIP)en_US
dc.relation.isversionofhttp://dx.doi.org/10.1063/1.4983315en_US
dc.rightsCreative Commons Attribution-Noncommercial-Share Alikeen_US
dc.rights.urihttp://creativecommons.org/licenses/by-nc-sa/4.0/en_US
dc.sourceMIT Web Domainen_US
dc.titleBroad ion energy distributions in helicon wave-coupled helium plasmaen_US
dc.typeArticleen_US
dc.identifier.citationWoller, K. B. et al. “Broad Ion Energy Distributions in Helicon Wave-Coupled Helium Plasma.” Physics of Plasmas 24, 5 (May 2017): 053513 © 2017 Author(s)en_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Nuclear Science and Engineeringen_US
dc.contributor.departmentMassachusetts Institute of Technology. Plasma Science and Fusion Centeren_US
dc.contributor.mitauthorWoller, Kevin Benjamin
dc.contributor.mitauthorWhyte, Dennis G
dc.contributor.mitauthorWright, Graham
dc.relation.journalPhysics of Plasmasen_US
dc.eprint.versionAuthor's final manuscripten_US
dc.type.urihttp://purl.org/eprint/type/JournalArticleen_US
eprint.statushttp://purl.org/eprint/status/PeerRevieweden_US
dc.date.updated2018-07-20T18:05:58Z
dspace.orderedauthorsWoller, K. B.; Whyte, D. G.; Wright, G. M.en_US
dspace.embargo.termsNen_US
dc.identifier.orcidhttps://orcid.org/0000-0002-0450-9731
dc.identifier.orcidhttps://orcid.org/0000-0002-9001-5606
mit.licenseOPEN_ACCESS_POLICYen_US


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