dc.contributor.author | Woller, Kevin Benjamin | |
dc.contributor.author | Whyte, Dennis G | |
dc.contributor.author | Wright, Graham | |
dc.date.accessioned | 2018-07-25T18:47:58Z | |
dc.date.available | 2018-07-25T18:47:58Z | |
dc.date.issued | 2017-05 | |
dc.date.submitted | 2017-02 | |
dc.identifier.issn | 1070-664X | |
dc.identifier.issn | 1089-7674 | |
dc.identifier.uri | http://hdl.handle.net/1721.1/117126 | |
dc.description.abstract | Helium ion energy distributions were measured in helicon wave-coupled plasmas of the dynamics of ion implantation and sputtering of surface experiment using a retarding field energy analyzer. The shape of the energy distribution is a double-peak, characteristic of radiofrequency plasma potential modulation. The broad distribution is located within a radius of 0.8 cm, while the quartz tube of the plasma source has an inner radius of 2.2 cm. The ion energy distribution rapidly changes from a double-peak to a single peak in the radius range of 0.7-0.9 cm. The average ion energy is approximately uniform across the plasma column including the double-peak and single peak regions. The widths of the broad distribution, ΔE, in the wave-coupled mode are large compared to the time-averaged ion energy, 〈E〉. On the axis (r = 0), ΔE/ 〈E〉 ≲ 3.4, and at a radius near the edge of the plasma column (r = 2.2 cm), ΔE/ 〈E〉 ∼ 1.2. The discharge parameter space is scanned to investigate the effects of the magnetic field, input power, and chamber fill pressure on the wave-coupled mode that exhibits the sharp radial variation in the ion energy distribution. | en_US |
dc.description.sponsorship | United States. Department of Energy (Award DESC00-02060) | en_US |
dc.description.sponsorship | United States. Department of Energy (Award DE-FC02-99ER54512) | en_US |
dc.publisher | American Institute of Physics (AIP) | en_US |
dc.relation.isversionof | http://dx.doi.org/10.1063/1.4983315 | en_US |
dc.rights | Creative Commons Attribution-Noncommercial-Share Alike | en_US |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-sa/4.0/ | en_US |
dc.source | MIT Web Domain | en_US |
dc.title | Broad ion energy distributions in helicon wave-coupled helium plasma | en_US |
dc.type | Article | en_US |
dc.identifier.citation | Woller, K. B. et al. “Broad Ion Energy Distributions in Helicon Wave-Coupled Helium Plasma.” Physics of Plasmas 24, 5 (May 2017): 053513 © 2017 Author(s) | en_US |
dc.contributor.department | Massachusetts Institute of Technology. Department of Nuclear Science and Engineering | en_US |
dc.contributor.department | Massachusetts Institute of Technology. Plasma Science and Fusion Center | en_US |
dc.contributor.mitauthor | Woller, Kevin Benjamin | |
dc.contributor.mitauthor | Whyte, Dennis G | |
dc.contributor.mitauthor | Wright, Graham | |
dc.relation.journal | Physics of Plasmas | en_US |
dc.eprint.version | Author's final manuscript | en_US |
dc.type.uri | http://purl.org/eprint/type/JournalArticle | en_US |
eprint.status | http://purl.org/eprint/status/PeerReviewed | en_US |
dc.date.updated | 2018-07-20T18:05:58Z | |
dspace.orderedauthors | Woller, K. B.; Whyte, D. G.; Wright, G. M. | en_US |
dspace.embargo.terms | N | en_US |
dc.identifier.orcid | https://orcid.org/0000-0002-0450-9731 | |
dc.identifier.orcid | https://orcid.org/0000-0002-9001-5606 | |
mit.license | OPEN_ACCESS_POLICY | en_US |