Rectangular photonic crystal nanobeam cavities in bulk diamond

Abstract

We demonstrate the fabrication of photonic crystal nanobeam cavities with rectangular cross section into bulk diamond. In simulation, these cavities have an unloaded quality (Q) factor of over 1 × 106. Measured cavity resonances show fundamental modes with spectrometer-limited Q factors ≥14×103 within 1 nm of the nitrogen vacancy centers zero phonon line at 637 nm. We find high cavity yield across the full diamond chip with deterministic resonance trends across the fabricated parameter sweeps.