A Silicon MEMS EM vibration energy harvester
Author(s)Yang, Ying-Ching Eric; Radhakrishna, Ujwal; Ward, D.; Chandrakasan, Anantha P; Lang, Jeffrey H.
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This paper presents an optimized silicon-MEMS electromagnetic vibration energy harvester suitable for applications such as machine health monitoring. The harvester comprises a DRIE-etched silicon suspension, and pick-and-place N42 NdBFe magnets and copper coils, housed in a 3D-printed package. The harvester is designed to operate near 50 Hz with 0.5-1 g vibrations using a long-stroke suspension. Multi-domain harvester optimization results in an open-circuit voltage of 1.7 V, a matched-load power output of 2.2 mW, and a matched-load power-output density of 1.23 mW/cm3 at 1.1 g with a resonance frequency of 76.3 Hz.
DepartmentMassachusetts Institute of Technology. Research Laboratory of Electronics; Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Journal of Physics: Conference Series
Yang, Y. "A Silicon MEMS EM vibration energy harvester." Journal of Physics: Conference Series, 1407 (November 2019). © Published under license by IOP Publishing Ltd.
Final published version