A MEMS Magnetic-Based Vibration Energy Harvester
Author(s)Shin, Abraham; Radhakrishna, Ujwal; Yang, Yuechen; Zhang, Q.; Gu, L.; Riehl, P.; Chandrakasan, Anantha P; Lang, Jeffrey H; ... Show more Show less
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This paper presents the design, analysis and integrated fabrication of a MEMS magnetic-based vibration energy harvester targeted for machine health monitoring. The design consists of Si-springs, permanent magnets as mass, and coils wound on the top and bottom side of the harvester package for mechanical-to-electrical energy conversion based on the Lorentz-force principle. The harvester is optimized to have its translational resonant-mode match external vibrations while separating higher-order modes. Mechanical and magnetic optimization of the harvester is carried out together with optimization of its power and control electronics in order to provide maximum output power from a vibration input that can vary its frequency by ±5%. The harvester achieves an open-circuit voltage amplitude of 145 mV and delivers 165 μW to a matched load at the resonance frequency of 45.7 Hz.
DepartmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Science; Massachusetts Institute of Technology. Research Laboratory of Electronics
Journal of Physics: Conference Series
Shin, A. et al. "A MEMS Magnetic-Based Vibration Energy Harvester." 17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Journal of Physics: Conference Series, 1052, IOP Publishing, 2018, 012082.
Final published version