Tunable Matching Networks Based on Phase-Switched Impedance Modulation1
Author(s)Jurkov, Alexander S.; Radomski, Aaron; Perreault, David J.
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The ability to provide accurate, rapid, and dynamically controlled impedance matching offers significant advantages to a wide range of present and emerging radio-frequency (RF) power applications. This article develops a new type of tunable matching network (TMN) that enables a combination of much faster and more accurate impedance matching than is available with conventional techniques and is suitable for use at high power levels. This implementation is based on a narrow-band technique, termed here phase-switched impedance modulation (PSIM), which entails the switching of passive elements at the RF operating frequency, effectively modulating their impedances. The proposed approach provides absorption of device parasitics and zero-voltage switching (ZVS) of the active devices, and we introduce control techniques that enable ZVS operation to be maintained across operating conditions. A prototype PSIM-based TMN is developed that provides a 50-Ω match over a load impedance range suitable for inductively coupled plasma processes. The prototype TMN operates at frequencies centered around 13.56 MHz at input RF power levels of up to 200 W.
DepartmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
IEEE Transactions on Power Electronics
Institute of Electrical and Electronics Engineers (IEEE)
Jurkov, Alexander S. et al. "Tunable Matching Networks Based on Phase-Switched Impedance Modulation1." IEEE Transactions on Power Electronics 35, 10 (October 2020): 10150 - 10167 © 2020 IEEE
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