| dc.contributor.author | Sun, Luzhao | |
| dc.contributor.author | Yuan, Guowen | |
| dc.contributor.author | Gao, Libo | |
| dc.contributor.author | Yang, Jieun | |
| dc.contributor.author | Chhowalla, Manish | |
| dc.contributor.author | Gharahcheshmeh, Meysam H | |
| dc.contributor.author | Gleason, Karen K | |
| dc.contributor.author | Choi, Yong S | |
| dc.contributor.author | Hong, Byung H | |
| dc.contributor.author | Liu, Zhongfan | |
| dc.date.accessioned | 2021-09-20T17:30:23Z | |
| dc.date.available | 2021-09-20T17:30:23Z | |
| dc.date.issued | 2021-01-14 | |
| dc.identifier.uri | https://hdl.handle.net/1721.1/131818 | |
| dc.publisher | Nature Publishing Group UK | en_US |
| dc.relation.isversionof | https://doi.org/10.1038/s43586-020-00005-y | en_US |
| dc.rights | Creative Commons Attribution-Noncommercial-Share Alike | en_US |
| dc.rights.uri | http://creativecommons.org/licenses/by-nc-sa/4.0/ | en_US |
| dc.source | Nature Publishing Group UK | en_US |
| dc.title | Chemical vapour deposition | en_US |
| dc.type | Article | en_US |
| dc.identifier.citation | Nature Reviews Methods Primers. 2021 Jan 14;1(1):5 | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Chemical Engineering | |
| dc.eprint.version | Author's final manuscript | en_US |
| dc.type.uri | http://purl.org/eprint/type/JournalArticle | en_US |
| eprint.status | http://purl.org/eprint/status/PeerReviewed | en_US |
| dc.date.updated | 2021-01-15T04:21:05Z | |
| dc.language.rfc3066 | en | |
| dc.rights.holder | Springer Nature Limited | |
| dspace.embargo.terms | Y | |
| dspace.date.submission | 2021-01-15T04:21:05Z | |
| mit.license | OPEN_ACCESS_POLICY | |
| mit.metadata.status | Authority Work and Publication Information Needed | |
