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dc.contributor.authorSun, Luzhao
dc.contributor.authorYuan, Guowen
dc.contributor.authorGao, Libo
dc.contributor.authorYang, Jieun
dc.contributor.authorChhowalla, Manish
dc.contributor.authorGharahcheshmeh, Meysam H
dc.contributor.authorGleason, Karen K
dc.contributor.authorChoi, Yong S
dc.contributor.authorHong, Byung H
dc.contributor.authorLiu, Zhongfan
dc.date.accessioned2021-09-20T17:30:23Z
dc.date.available2021-09-20T17:30:23Z
dc.date.issued2021-01-14
dc.identifier.urihttps://hdl.handle.net/1721.1/131818
dc.publisherNature Publishing Group UKen_US
dc.relation.isversionofhttps://doi.org/10.1038/s43586-020-00005-yen_US
dc.rightsCreative Commons Attribution-Noncommercial-Share Alikeen_US
dc.rights.urihttp://creativecommons.org/licenses/by-nc-sa/4.0/en_US
dc.sourceNature Publishing Group UKen_US
dc.titleChemical vapour depositionen_US
dc.typeArticleen_US
dc.identifier.citationNature Reviews Methods Primers. 2021 Jan 14;1(1):5en_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Chemical Engineering
dc.eprint.versionAuthor's final manuscripten_US
dc.type.urihttp://purl.org/eprint/type/JournalArticleen_US
eprint.statushttp://purl.org/eprint/status/PeerRevieweden_US
dc.date.updated2021-01-15T04:21:05Z
dc.language.rfc3066en
dc.rights.holderSpringer Nature Limited
dspace.embargo.termsY
dspace.date.submission2021-01-15T04:21:05Z
mit.licenseOPEN_ACCESS_POLICY
mit.metadata.statusAuthority Work and Publication Information Needed


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