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dc.contributor.authorMelville, A
dc.contributor.authorCalusine, G
dc.contributor.authorWoods, W
dc.contributor.authorSerniak, K
dc.contributor.authorGolden, E
dc.contributor.authorNiedzielski, BM
dc.contributor.authorKim, DK
dc.contributor.authorSevi, A
dc.contributor.authorYoder, JL
dc.contributor.authorDauler, EA
dc.contributor.authorOliver, WD
dc.date.accessioned2021-10-27T19:56:20Z
dc.date.available2021-10-27T19:56:20Z
dc.date.issued2020
dc.identifier.urihttps://hdl.handle.net/1721.1/133723
dc.description.abstract© 2020 Author(s). Lossy dielectrics are a significant source of decoherence in superconducting quantum circuits. In this report, we model and compare the dielectric loss in bulk and interfacial dielectrics in titanium nitride (TiN) and aluminum (Al) superconducting coplanar waveguide resonators. We fabricate isotropically trenched resonators to produce a series of device geometries that accentuate a specific dielectric region's contribution to the resonator quality factor. While each dielectric region contributes significantly to loss in TiN devices, the metal-air interface dominates the loss in the Al devices. Furthermore, we evaluate the quality factor of each TiN resonator geometry with and without a post-process hydrofluoric etch and find that it reduced losses from the substrate-air interface, thereby improving the quality factor.
dc.language.isoen
dc.publisherAIP Publishing
dc.relation.isversionof10.1063/5.0021950
dc.rightsCreative Commons Attribution 4.0 International license
dc.rights.urihttps://creativecommons.org/licenses/by/4.0/
dc.sourceAmerican Institute of Physics (AIP)
dc.titleComparison of dielectric loss in titanium nitride and aluminum superconducting resonators
dc.typeArticle
dc.contributor.departmentLincoln Laboratory
dc.contributor.departmentMassachusetts Institute of Technology. Research Laboratory of Electronics
dc.contributor.departmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
dc.relation.journalApplied Physics Letters
dc.eprint.versionFinal published version
dc.type.urihttp://purl.org/eprint/type/JournalArticle
eprint.statushttp://purl.org/eprint/status/PeerReviewed
dc.date.updated2021-03-24T13:37:18Z
dspace.orderedauthorsMelville, A; Calusine, G; Woods, W; Serniak, K; Golden, E; Niedzielski, BM; Kim, DK; Sevi, A; Yoder, JL; Dauler, EA; Oliver, WD
dspace.date.submission2021-03-24T13:37:19Z
mit.journal.volume117
mit.journal.issue12
mit.licensePUBLISHER_CC
mit.metadata.statusAuthority Work and Publication Information Needed


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