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dc.contributor.authorYeatman, Eric M
dc.contributor.authorGramling, Hannah M
dc.contributor.authorWang, Evelyn
dc.date.accessioned2021-11-10T20:37:13Z
dc.date.available2021-10-27T20:09:14Z
dc.date.available2021-11-10T20:37:13Z
dc.date.issued2017
dc.identifier.urihttps://hdl.handle.net/1721.1/134799.2
dc.language.isoen
dc.publisherSpringer Science and Business Media LLCen_US
dc.relation.isversionofhttp://dx.doi.org/10.1038/MICRONANO.2017.79en_US
dc.rightsCreative Commons Attribution 4.0 International licenseen_US
dc.rights.urihttps://creativecommons.org/licenses/by/4.0/en_US
dc.sourceNatureen_US
dc.titleIntroduction to the special topic on nanomanufacturingen_US
dc.typeArticleen_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Mechanical Engineeringen_US
dc.relation.journalMicrosystems and Nanoengineeringen_US
dc.eprint.versionFinal published versionen_US
dc.type.urihttp://purl.org/eprint/type/JournalArticleen_US
eprint.statushttp://purl.org/eprint/status/PeerRevieweden_US
dc.date.updated2020-08-12T16:33:08Z
dspace.orderedauthorsYeatman, EM; Gramling, HM; Wang, ENen_US
dspace.date.submission2020-08-12T16:33:10Z
mit.journal.volume3en_US
mit.journal.issue1en_US
mit.licensePUBLISHER_CC
mit.metadata.statusPublication Information Neededen_US


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