High-Scalability CMOS Quantum Magnetometer With Spin-State Excitation and Detection of Diamond Color Centers
Author(s)
Ibrahim, Mohamed I; Foy, Christopher; Englund, Dirk R; Han, Ruonan
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© 1966-2012 IEEE. Magnetometers based on quantum mechanical processes enable high sensitivity and long-term stability without the need for re-calibration, but their integration into fieldable devices remains challenging. This article presents a CMOS quantum vector-field magnetometer that miniaturizes the conventional quantum sensing platforms using nitrogen-vacancy (NV) centers in diamond. By integrating key components for spin control and readout, the chip performs magnetometry through optically detected magnetic resonance (ODMR) through a diamond slab attached to a custom CMOS chip. The ODMR control is highly uniform across the NV centers in the diamond, which is enabled by a CMOS-generated 2.87 GHz magnetic field with < 5% inhomogeneity across a large-area current-driven wire array. The magnetometer chip is 1.5 mm2 in size, prototyped in 65-nm bulk CMOS technology, and attached to a 300 × 80 μm2 diamond slab. NV fluorescence is measured by CMOS-integrated photodetectors. This ON-chip measurement is enabled by efficient rejection of the green pump light from the red fluorescence through a CMOS-integrated spectral filter based on a combination of spectrally dependent plasmonic losses and diffractive filtering in the CMOS back-end-of-line (BEOL). This filter achieves a measured 25 dB of green light rejection. We measure a sensitivity of 245 nT/Hz1/2, marking a 130 × improvement over a previous CMOS-NV sensor prototype, largely thanks to the better spectral filtering and homogeneous microwave generation over larger area.
Date issued
2021Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer ScienceJournal
IEEE Journal of Solid-State Circuits
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Citation
Ibrahim, Mohamed I, Foy, Christopher, Englund, Dirk R and Han, Ruonan. 2021. "High-Scalability CMOS Quantum Magnetometer With Spin-State Excitation and Detection of Diamond Color Centers." IEEE Journal of Solid-State Circuits, 56 (3).
Version: Original manuscript