Advanced Heterogeneous Integration Enabled by 3D Freestanding Membranes—From Material Growths to Applications

Author(s)
Kim, Jeehwan
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Creative Commons Attribution-Noncommercial-Share Alike http://creativecommons.org/licenses/by-nc-sa/4.0/
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Description
Conference: Materials Research Society, Boston, Nov 2022
Date issued
2022-11-27
URI
https://hdl.handle.net/1721.1/153560
Department
Massachusetts Institute of Technology. Department of Mechanical Engineering; Massachusetts Institute of Technology. Department of Materials Science and Engineering; Massachusetts Institute of Technology. Research Laboratory of Electronics
Publisher
US DOE
Citation
Kim, Jeehwan. Advanced Heterogeneous Integration Enabled by 3D Freestanding Membranes—From Material Growths to Applications. United States: N. p., 2022.
Version: Author's final manuscript
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