High-throughput three-dimensional (3D) lithographic microfabrication in biomedical applications
Author(s)Kim, Daekeun; So, Peter T. C.
MetadataShow full item record
Two-photon excitation microfabrication has been shown to be useful in the field of photonics and biomedicine. It generates 3D microstructures and provides sub-diffraction fabrication resolution. Nevertheless, laser direct writing, the most popular two-photon fabrication technique, has slow fabrication speed, and its applications are limited to prototyping. In this proceeding, we propose high-throughput 3D lithographic microfabrication system based on depthresolved wide-field illumination and build several 3D microstructures with SU-8. Through these fabrications, 3D lithographic microfabrication has scalable function and high-throughput capability. It also has the potential for fabricating 3D microstructure in biomedical applications, such as intertwining channels in 3D microfluidic devices for biomedical analysis and 3D cell patterning in the tissue scaffolds.
DepartmentMassachusetts Institute of Technology. Department of Biological Engineering; Massachusetts Institute of Technology. Department of Mechanical Engineering
Proceedings of SPIE--the International Society for Optical Engineering; v.7569
Society of Photo-optical Instrumentation Engineers
Kim, Daekeun, and Peter T. C. So. “High-throughput three-dimensional (3D) lithographic microfabrication in biomedical applications.” Multiphoton Microscopy in the Biomedical Sciences X. Ed. Ammasi Periasamy, Peter T. C. So, & Karsten Konig. San Francisco, California, USA: SPIE, 2010. 75691V-5. ©2010 SPIE--The International Society for Optical Engineering.
Final published version
Proc. of SPIE Vol. 7569 75691V-4