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Integration of reactive polymeric nanofilms into a low-power electromechanical switch for selective chemical sensing

Author(s)
Arora, William J.; Tenhaeff, Wyatt E.; Gleason, Karen K.; Barbastathis, George
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Abstract
This paper presents the fabrication and demonstration of an ultrathin microelectromechanical chemical sensing device. Microcantilevers are etched from 100-nm-thick silicon nitride, and a 75-nm-thick reactive copolymer film for sensing is deposited by initiated chemical vapor deposition. Cross-linking densities of the polymer films are controlled during the deposition process; it is shown that greater cross-linking densities yield greater cantilever deflections upon the polymer's reaction with the analyte. Considering that chemical reactions are necessary for stress formation, the sensing is selective. Cantilever deflections of greater than 3 à ¿m are easily attained, which allow a simple switch to be designed with resistance-based outputs. When exposed to a hexylamine vapor-phase concentration of 0.87 mol%, the resistance of the switch drops by over six orders of magnitude with a response time of less than 90 s.
Date issued
2009-02
URI
http://hdl.handle.net/1721.1/58862
Department
Massachusetts Institute of Technology. Institute for Soldier Nanotechnologies; Massachusetts Institute of Technology. Department of Chemical Engineering; Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science; Massachusetts Institute of Technology. Department of Mechanical Engineering
Journal
Journal of Microelectromechanical Systems
Publisher
Institute of Electrical and Electronics Engineers
Citation
Arora, W.J. et al. “Integration of Reactive Polymeric Nanofilms Into a Low-Power Electromechanical Switch for Selective Chemical Sensing.” Microelectromechanical Systems, Journal of 18.1 (2009): 97-102. © Copyright 2009 IEEE
Version: Final published version
Other identifiers
INSPEC Accession Number: 10445081
ISSN
1057-7157
Keywords
three-dimensional nanomanufacturing, three-dimensional nanomanufacturing, thin films, microsensors, Chemical–vapor deposition (CVD)

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