Optical loss reduction in HIC chalcogenide glass waveguides via thermal reflow

Author(s)
Hu, Juejun; Feng, Ning-Ning; Agarwal, Anuradha Murthy; Kimerling, Lionel C.; Carlie, Nathan; ... Show more
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Abstract
A rapid thermal reflow technique is applied to high-index-contrast, sub-micron waveguides in As[subscript 2]S[subscript 3] chalcogenide glass to reduce sidewall roughness and associated optical scattering loss. Up to 50% optical loss reduction after reflow treatment is achieved.
Date issued
2009-08
URI
http://hdl.handle.net/1721.1/59388
Department
MIT Materials Research Laboratory; Massachusetts Institute of Technology. Department of Materials Science and Engineering; Massachusetts Institute of Technology. Microphotonics Center
Journal
Proceedings of the Conference on Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference
Publisher
Institute of Electrical and Electronics Engineers
Citation
Juejun Hu et al. “Optical loss reduction in HIC chalcogenide glass waveguides via thermal reflow.” Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on. 2009. 1-2. © 2009 OSA/CLEO/IQEC 2009 ©2009 IEEE
Version: Final published version
Other identifiers
INSPEC Accession Number: 10859288
ISBN
978-1-55752-869-8
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