dc.contributor.author | Cheung, Kerry | |
dc.contributor.author | Velasquez-Heller, Luis Fernand | |
dc.contributor.author | Akinwande, Akintunde Ibitayo | |
dc.date.accessioned | 2012-04-04T18:20:50Z | |
dc.date.available | 2012-04-04T18:20:50Z | |
dc.date.issued | 2010-06 | |
dc.date.submitted | 2010-03 | |
dc.identifier.issn | 1057-7157 | |
dc.identifier.issn | 1941-0158 | |
dc.identifier.other | INSPEC Accession Number: 11328191 | |
dc.identifier.uri | http://hdl.handle.net/1721.1/69931 | |
dc.description.abstract | We report the design, fabrication, and characterization of a new class of chip-scale quadrupole mass filter (QMF). The devices are completely batch fabricated using a wafer-scale process that integrates the quadrupole electrodes, ion optics, and housing into a single monolithic block. This process eliminates the electrode-to-housing misalignments inherent in other QMFs and enables the implementation of complex device architectures. To achieve the reported integration, 1 mm × 1 mm square electrodes of heavily doped silicon were utilized, resulting in quadrupoles with an effective aperture radius of 0.707 mm and a length of 30 mm. Mass filtering was demonstrated with this unconventional device showing a mass range of 650 amu and a resolution of ~30 at a drive frequency of 1.8 MHz. When operated in the second stability region at 2.0 MHz and a mass range of 50 amu, a peak width of 0.3 amu was achieved at mass 28, showing a resolution of ~90. This paper introduces operation in the second stability region as a reliable method for turning QMFs with less than ideal electrode geometries into high-performance devices. | en_US |
dc.description.sponsorship | United States. Defense Advanced Research Projects Agency. Microsystems Technology Office (Contract W911QY-05-1-0002) | en_US |
dc.description.sponsorship | Massachusetts Institute of Technology. Institute for Soldier Nanotechnologies | en_US |
dc.language.iso | en_US | |
dc.publisher | Institute of Electrical and Electronics Engineers (IEEE) | en_US |
dc.relation.isversionof | http://dx.doi.org/10.1109/JMEMS.2010.2046396 | en_US |
dc.rights | Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. | en_US |
dc.source | IEEE | en_US |
dc.title | Chip-Scale Quadrupole Mass Filters for Portable Mass Spectrometry | en_US |
dc.type | Article | en_US |
dc.identifier.citation | Cheung, Kerry, Luis Fernando Velasquez-Garcia, and Akintunde Ibitayo Akinwande. “Chip-Scale Quadrupole Mass Filters for Portable Mass Spectrometry.” Journal of Microelectromechanical Systems 19.3 (2010): 469–483. Web. 4 Apr. 2012. © 2010 Institute of Electrical and Electronics Engineers | en_US |
dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | en_US |
dc.contributor.department | Massachusetts Institute of Technology. Microsystems Technology Laboratories | en_US |
dc.contributor.approver | Cheung, Kerry | |
dc.contributor.mitauthor | Cheung, Kerry | |
dc.contributor.mitauthor | Velasquez-Heller, Luis Fernand | |
dc.contributor.mitauthor | Akinwande, Akintunde Ibitayo | |
dc.relation.journal | Journal of Microelectromechanical Systems | en_US |
dc.eprint.version | Final published version | en_US |
dc.type.uri | http://purl.org/eprint/type/JournalArticle | en_US |
eprint.status | http://purl.org/eprint/status/PeerReviewed | en_US |
dspace.orderedauthors | Cheung, Kerry; Velasquez-Garcia, Luis Fernando; Akinwande, Akintunde Ibitayo | en |
dc.identifier.orcid | https://orcid.org/0000-0003-3001-9223 | |
mit.license | PUBLISHER_POLICY | en_US |
mit.metadata.status | Complete | |