MIT Libraries logoDSpace@MIT

MIT
View Item 
  • DSpace@MIT Home
  • MIT Open Access Articles
  • MIT Open Access Articles
  • View Item
  • DSpace@MIT Home
  • MIT Open Access Articles
  • MIT Open Access Articles
  • View Item
JavaScript is disabled for your browser. Some features of this site may not work without it.

CNT-based gas ionizers with integrated MEMS gate for portable mass spectrometry applications

Author(s)
Velasquez-Garcia, Luis Fernando; Gassend, Blaise; Akinwande, Akintunde Ibitayo
Thumbnail
DownloadAkinwande_CNT-based gas ionizers with integrated.pdf (976.0Kb)
PUBLISHER_POLICY

Publisher Policy

Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.

Terms of use
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
Metadata
Show full item record
Abstract
We report the fabrication and experimental characterization of a novel low-cost carbon nanotube (CNT)-based electron impact ionizer (EII) with integrated gate for portable mass spectrometry applications. The device achieves low-voltage ionization using sparse forests of plasma-enhanced chemical vapor deposited (PECVD) CNTs field emitter tips, and a proximal gate with open apertures to facilitate electron transmission. The gate is integrated using a deep reactive ion etched (DRIE) spring-based high-voltage MEMS packaging technology. The device also includes a high aspect-ratio silicon structure (mufoam) that facilitates sparse CNT growth and limits the electron current per emitter. The devices were tested as field emitters in high vacuum (10-8 Torr). Electron emission starts at a gate voltage of 110 V, and reaches a current of 9 uA at 250 V (2.25 mW) with more than 55% of the electrons transmitted through the gate apertures. The devices were also tested as electron impact ionizers using argon. The experimental data demonstrates that the CNT-EIIs can operate at mtorr-level pressures while delivering 60 nA of ion current at 250 V with about 1% ionization efficiency.
Date issued
2009-06
URI
http://hdl.handle.net/1721.1/72044
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science; Massachusetts Institute of Technology. Microsystems Technology Laboratories
Journal
Proceedings of the 15th International Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009
Publisher
Institute of Electrical and Electronics Engineers
Citation
Velasquez-Garcia, L.F., B. Gassend, and A.I. Akinwande. “CNT-based Gas Ionizers with Integrated MEMS Gate for Portable Mass Spectrometry Applications.” IEEE, 2009. 1646–1649. © 2009 IEEE.
Version: Final published version
Other identifiers
INSPEC Accession Number: 10917099
W2B.002
ISBN
978-1-4244-4193-8
978-1-4244-4190-7

Collections
  • MIT Open Access Articles

Browse

All of DSpaceCommunities & CollectionsBy Issue DateAuthorsTitlesSubjectsThis CollectionBy Issue DateAuthorsTitlesSubjects

My Account

Login

Statistics

OA StatisticsStatistics by CountryStatistics by Department
MIT Libraries
PrivacyPermissionsAccessibilityContact us
MIT
Content created by the MIT Libraries, CC BY-NC unless otherwise noted. Notify us about copyright concerns.