Show simple item record

dc.contributor.authorWang, Wentao
dc.contributor.authorWeinstein, Dana
dc.date.accessioned2013-02-04T20:52:50Z
dc.date.available2013-02-04T20:52:50Z
dc.date.issued2011-05
dc.identifier.isbn978-1-61284-111-3
dc.identifier.issn1075-6787
dc.identifier.issn1932-2380
dc.identifier.otherINSPEC Accession Number: 12178210
dc.identifier.urihttp://hdl.handle.net/1721.1/76722
dc.description.abstractThis work presents the design of acoustic Bragg reflectors (ABRs) for unreleased MEMS resonators through analysis and simulation. Two of the greatest challenges to the successful implementation of MEMS are those of packaging and integration with integrated circuits. Development of unreleased RF MEMS resonators at the transistor level of the CMOS stack will enable direct integration into front-end-of-line (FEOL) processing, making these devices an attractive choice for on-chip signal generation and signal processing. The use of ABRs in unreleased resonators reduces spurious modes while maintaining high quality factors. Analysis on unreleased resonators using ABRs covers design principles, effects of fabrication variation, and comparison to released devices. Additionally, ABR-based unreleased resonators are compared with unreleased resonators enhanced using phononic crystals, showing order of magnitude higher quality factor (Q) for the ABR-based devices.en_US
dc.description.sponsorshipUnited States. Defense Advanced Research Projects Agency (DARPA Young Faculty Award)en_US
dc.description.sponsorshipSemiconductor Research Corporation (Center for Materials, Structures and Devices (MSD))en_US
dc.language.isoen_US
dc.publisherInstitute of Electrical and Electronics Engineersen_US
dc.relation.isversionofhttp://dx.doi.org/10.1109/FCS.2011.5977903en_US
dc.rightsCreative Commons Attribution-Noncommercial-Share Alike 3.0en_US
dc.rights.urihttp://creativecommons.org/licenses/by-nc-sa/3.0/en_US
dc.sourceWentao Wangen_US
dc.titleAcoustic Bragg Reflectors for Q-Enhancement of Unreleased MEMS Resonatorsen_US
dc.typeArticleen_US
dc.identifier.citationWang, Wentao, and Dana Weinstein. “Acoustic Bragg Reflectors for Q-enhancement of Unreleased MEMS Resonators.” in Proceedings of the 2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum, IEEE, 2011. 1–6. Web.en_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Scienceen_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Mechanical Engineeringen_US
dc.contributor.departmentMassachusetts Institute of Technology. Microsystems Technology Laboratoriesen_US
dc.contributor.approverWeinstein, Dana
dc.contributor.mitauthorWang, Wentao
dc.contributor.mitauthorWeinstein, Dana
dc.relation.journalProceedings of the 2011 Joint Conference of the IEEE International Frequency Control Symposium & European Frequency and Time Forumen_US
dc.eprint.versionAuthor's final manuscripten_US
dc.type.urihttp://purl.org/eprint/type/ConferencePaperen_US
dspace.orderedauthorsWang, Wentao; Weinstein, Danaen
mit.licenseOPEN_ACCESS_POLICYen_US


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record